Gate Oxide Reliability and V<sub>TH</sub> Stability of Planar SiC MOS Technology

Author:

Domeij Martin1,Franchi Jimmy1,Maslougkas Sotirios1,Moens Peter1,Lettens Jan1,Choi Jake1,Allerstam Fredrik1

Affiliation:

1. ON Semiconductor

Abstract

Similar charge to failure distributions with mean values of about 50 C/cm2 were measured for planar SiC MOSFETs and MOS capacitors. Fast occurring and saturating negative flatband and threshold voltage drops were found in time resolved 1 second long pulsed gate current stress with IG=1 mA/cm2 at T=150 °C. No substantial difference in VTH drift rate with VGS=28 V at T=150 °C was found after about 10 s recovery period for IG stressed devices compared with unstressed devices. Additionally, IG stressed and unstressed devices did not differ in final VTH shift at T=25 °C after VGS=28 V stress (during 3 hrs or 31 hrs). More gate oxide reliability characterization is important to determine if 1 mA/cm2 pulsed gate current stress creates any permanent changes to the SiC MOSFET device behaviour. Additionally, parametric shifts in VTH and RDSon was examined after long-term AC gate bias stress by a gate driver switching between-8V and 20V for four different commercially available SiC MOSFETs.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference7 articles.

1. K. Matocha, I-H. Ji, X. Zhang and S. Chowdury, Proceedings of the 2019 IEEE International Reliability Physics Symposium (IRPS), p.276, (2019).

2. P. Moens, J. Franchi, J. Lettens, L. De Schepper, M. Domeij and F. Allerstam, 2020 32nd International Symposium on Power Semiconductor Devices and ICs (ISPSD), pp.78-81, (2020).

3. S. Maaß, H. Reisinger, T. Aichinger and G. Rescher, 2020 IEEE International Reliability Physics Symposium (IRPS), (2020).

4. Infineon Application Note AN2018-09 https://www.infineon.com/cms/en/product/power/wide- band-gap-semiconductors-sic-gan/#!documents.

5. X. Zhong et. al., IEEE Transactions on Power Electronics, Bias Temperature Instability of Silicon Carbide Power MOSFET under AC Gate Stresses,, DOI 10.1109/TPEL.2021.3105272, IEEE.

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