Parametric Studies on Particle Removal and Erosion in Nozzle Injection Megasonic Cleaning

Abstract

The process of quickly removing abrasive particles of silica and ceria slurries is important in the use of CMP equipment. Megasonic cleaning of nozzle injection type is one of a variety of post-CMP cleaning methods and its performance including cleaning efficiency and erosion was explored experimentally with parametric studies. In the cleaning process, it is favorable to achieve both high efficiency and low damage. The cleaning efficiency was defined by particle removal efficiency (PRE) with a glass sample spin-coated with small silica particles; the damage was detected from mass loss of aluminum foils after the cleaning. The cleaning tests show that the performance of nozzle injection megasonic cleaning depends significantly on ultrasound frequency and water temperature. Toward more efficient and less erosive cleaning, the nozzle injection angle is also expected to play a key role.