Detonation Spraying of Composite Targets Based on Ni, Cr and B₄C for Magnetron Multi-Functional Coating

Abstract

The paper presents a method of producing a ceramic metal composite target by detonation gas-thermal spraying allowing spraying almost any powder compositions with high deposition efficiency of up to 90% and the possibility of spraying large areas at a relatively low cost, differentiation by coating thickness and size. The efficiency of detonation technology and related devices for the production of original composite cathodes for magnetron sputtering using the example of the powder composition Ni + Cr + B4C is justified. These materials make it possible to obtain composite coatings with a unique composition and characteristics using a magnetron. Magnetron sputtering is one of the most suitable methods for the industry. The influence of the process mode of metal ceramic powder application on copper substrate is considered. The structure of a metal-ceramic composite target was studied by scanning electron microscopy. It was shown that the target surface is dense without visible pores. The elemental composition of the powder is uniformly distributed over the target surface.