Research Progress of Nitride Coating Process Prepared by Cathodic Arc Ion Plating-Reference-Cited by-同舟云学术

Research Progress of Nitride Coating Process Prepared by Cathodic Arc Ion Plating

Published:2022-12-23 Issue: Volume:340 Page:27-32
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Wang Xin Wu¹,Sun Hao Bin²,Zhang Hua²,Li Chang Ye²,Zhao Cheng Liang²,Si Shou Ji²,Yao Hai Bin²,Yu Hui Jun³,Chen Chuan Zhong³

Affiliation:

1. Shandong Agricultural and Engineering University

2. Penglai Cemented Carbide Co., Ltd.

3. Shandong University

Abstract

As the main process of carbide tool coating fabrication, cathodic arc ion plating plays an important role in modern industrial production. This paper introduces the influence of process parameter selection on the coating properties of tools by cathodic arc ion plating. The process parameters mainly include nitrogen partial pressure, negative bias pressure and arc current, and the coating properties are mainly characterized by deposition rate, phase composition, coating hardness and surface quality. It can optimize the selection of process parameters on modern industrial production.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.340.27.pdf

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