Formation of 3C-SiC Films Embedded in SiO<sub>2</sub> by Sacrificial Oxidation-Reference-Cited by-同舟云学术

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Formation of 3C-SiC Films Embedded in SiO₂ by Sacrificial Oxidation

Published:2004-06 Issue: Volume:457-460 Page:1515-1518
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Panknin D.¹,Godignon Phillippe²,Mestres Narcis³,Polychroniadis Efstathios K.⁴,Stoemenos J.⁵,Ferro Gabriel⁶,Pezoldt Jörg⁷,Skorupa Wolfgang⁸

Affiliation:

1. Forschungszentrum Rossendorf

2. IMB-CNM, CSIC

3. Imperial College London

4. Aristotle University of Thessaloniki

5. Aristotele University of Thessaloniki

6. Université de Lyon

7. Technische Universität Ilmenau

8. Helmholtz-Center Dresden-Rossendorf

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.457-460.1515.pdf

Reference9 articles.

1. J.M. Bluet, S Contreras-Azema, J. Camassel, J.L. Robert, L. Di Cioccio, W. Reichert, R. Lossy, E. Obermeier, J. Stoemenos Mat. Sc. Eng. B Vol. 46 (1997) 152.

2. L. Di Cioccio, F. Letertre, Y. Le Tiec, A.M. Papon, C. Jaussaud, M. Bruel, Mat. Sc. Eng. B Vol. 46 (1997) 349.

3. E. Hugonnard-Bruyere, J.L. Cantin, H.J. von Bardeleben, F. Letertre, L. Di Cioccio, T. Ouisse.

4. M. Eickhoff, N. Vouroutzis, A. Nielsen, G. Krötz and J. Stoemenos, J. Electrochem. Soc. Vol. 148 (2001) pp. G336.

5. T. Chassagne, G. Ferro, D. Chaussende, F. Cauwet, Y. Monteil and J. Bouix, Thin Solid Films Vol. 402 (2002) 83.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Semiconductor Applications;Flash Lamp Annealing;2019

2. 3C-SiC Heteroepitaxial Growth on Silicon: The Quest for Holy Grail;Critical Reviews in Solid State and Materials Sciences;2014-09-25

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