Fabrication of Mesa-Type pn Diodes without Forward Degradation on Ultra-High-Quality 6H-SiC Substrate-Reference-Cited by-同舟云学术

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Fabrication of Mesa-Type pn Diodes without Forward Degradation on Ultra-High-Quality 6H-SiC Substrate

Published:2004-06 Issue: Volume:457-460 Page:1009-1012
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Tanaka Yasunori¹,Ohno Takaya²,Oyanagi Naoki²,Nishizawa Shin Ichi¹,Suzuki Takaya³,Fukuda Kenji¹,Yatsuo Tsutomu⁴,Arai Kazuo¹

Affiliation:

1. National Institute of Advanced Industrial Science and Technology (AIST)

2. UPR Ultra-Low-Loss Power Device Technology Research Body

3. National Institute of Advanced Industrial Science and Technology

4. National Institute of Advanced Industrial Science and Technology, AIST

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.457-460.1009.pdf

Reference16 articles.

1. O. Korkina, J.P. Bergman, A. Henry, E. Janzén, S. Savage, J. André, L.P. Ramberg, U. Lindefelt, W. Hermansson and K. Bergman: Appl. Phys. Lett. Vol. 67 (1995) p.1561.

2. D. Peters, R. Schörner, K. -H. Hölzlein and P. Friedrichs: Appl. Phys. Lett. Vol. 71 (1997) p.2996.

3. N.V. Dyakonova, P.A. Ivanov, V.A. Kozlov, M.E. Levinshtein, J.W. Palmour, S.L. Rumyantsev and R. Singh: IEEE Trans. Electron Devices Vol. 46 (1999) p.2188.

4. Y. Sugawara, D. Takayama, K. Asano, R. Singh, J. Palmour and T. Hayashi: Proc. 2001 International Symposium on Power Semiconductor Devices, Osaka, Japan, p.27 (2001).

5. V.E. Chelnokov, A.L. Syrkin and V.A. Dmitriev: Diamond and Related Materials Vol. 6 (1997) p.1480.

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