Analysis of Electron Channeling Contrast Imaging in Scanning Electron Microscopes

Abstract

In the paper, the influence factors of electron channeling contrast imaging (ECCI) on crystalline material microstructure characterization by scanning electron microscopes (SEMs) were analyzed, such as electric current, accelerating voltage and sample material’s surface conditions. It was found that high current, appropriate accelerating voltage and smooth sample surface were more beneficial to obtaining an ideal channel effect pattern. In addition, the difference between the channel effect contrast and the EBSD technology was also investigated. And the results showed that the channel effect contrast image could qualitatively characterize grains with different orientations. However, it was far less sensitive than EBSD in characterizing small angle grain boundaries.