Application of Multi-Element Targets for the Formation of High Entropy Coatings

Abstract

The development of modern technologies in various industries cannot be imagined without the development and use of new materials, including new highly entropic alloys (HEA) and coatings based on them, as more advanced in terms of performance compared to traditional materials and coatings. Methods for producing various highly entropic alloys are described in many literature. Almost all such technologies at the moment cannot be applicable in the mass production of parts due to the high cost and lack of appropriate infrastructure and production technologies. However, obtaining coatings formed on the basis of highly entropic alloys for various parts of mechanisms and machines is currently a highly promising direction in improving the operational properties of work surfaces. The goal of this work is to create highly entropic coatings obtained by magnetron sputtering of special multicomponent targets. The paper shows the possibility of synthesis of coatings of the predicted composition and properties. A coating based on a matrix target made of 12Kh18N10T steel with pressed multicomponent Cr-Ni-Zr-Ti-Cu pellets was synthesized. The elemental composition of the coating and its properties were determined, the microhardness was measured, and the functional properties were established.