Self-Limiting Formation and Optical Properties of Hemispherical Grains of Microcrystalline Silicon on an Amorphous Silicon Film Surface
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Published:2003-06
Issue:
Volume:93
Page:269-274
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ISSN:1662-9779
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Container-title:Solid State Phenomena
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language:
-
Short-container-title:SSP
Affiliation:
1. NTT Microsystem Intergration Laboratories
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics