Study on the Electrical Properties of Direct-Patternable SBT Films Formed by Photochemical Metal-Organic Deposition

Author:

Park Hyeong Ho1,Park Hyung Ho1,Chang Ho Jung2,Jeon Hyeong Tag3

Affiliation:

1. Yonsei University

2. Dankook University

3. Hanyang University

Abstract

The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700oC were 5.8 and 4.7 )C/cm2 and after anneal at 750oC, the values were 10.8 and 9.3 )C/cm2, respectively.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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