Affiliation:
1. Chien Kuo Institute of Technology Changhua
Abstract
In this work, the comprehensive study of an interesting Pd/AlGaAs pseudomorphic high
electron mobility transistor (pHEMT) based hydrogen sensor is implemented. The theoretical
analysis and simulation are made by using a two-dimensional simulator Medici. In addition, a
practical device is fabricated successfully. Based on the variations of the catalytic metal work
function, the DC characteristics of experimental and simulated results are compared and studied.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
1 articles.
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