Affiliation:
1. UPMC Univ Paris 6; Univ Paris Sud 11
Abstract
The terahertz domain (500 GHz - 5 THz) has been object of unceasing research activities,
due to the wide range of conceivable applications in these fields. This study focuses on the
development of semiconducting YBa2Cu3O6+x (YBCO) thin films to be used as sensitive elements
on future uncooled terahertz imagers working on a thermal principle. YBCO thin films have been
hollow-cathode sputtered on MgO single-crystals under different conditions. Electrical and
structural characterizations have then been carried out. The resistivity of the thin films and the
temperature coefficient of resistance (TCR) have been determined. X-ray diffraction and atomic
force microscopy analyses have then been performed. If compared with materials currently used as
sensing element in commercial near-infrared imagers, electrical characterization shows values of
the TCR comparable to amorphous silicon and almost two times better than VOx-compounds.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
22 articles.
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