Affiliation:
1. ICEMS-Grupo de Materiais e Engenharia de Superfícies
2. University of Coimbra, ICEMS
Abstract
Tungsten oxynitride films (WOxNy) were deposited with a chemical composition in the range of 0 < x < 1 and 0 < y < 1. For the W-N system, the α-W, β-W, and β-W2N phases were identified according to the amount of nitrogen. In the W-O-N system the structure depended on the amount of oxygen. For an oxygen fraction, fO2 = CO/(CO+CN), smaller than 0.46 the β-W2N phase is evident, whereas above that value the structure became amorphous.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
8 articles.
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