A New Method to Analyze the Stiffness of MEMS Accelerometer

Abstract

The finite element method to obtain the stiffness of MEMS (Micro-Electro-Mechanical Systems) accelerometer is difficult to give an exact expression, so a new method to analyze the stiffness of MEMS accelerometer was purposed. Both Mechanics and electricity analysis were used to calculate the stiffness of vacuum microelectronic accelerometer developed in our laboratory, and the control and detection circuits were design according to the result. Finally, the sensitivity, linearity and other performance were measured through the static gravitational field experiments; the least squares curve fitting correlation coefficient 0.9999 and linear 0.9%. The result shows that this method to analyze the stiffness of the stiffness of vacuum microelectronics accelerometer is correct and feasible, and this method can also be applied to other MEMS accelerometer with symmetrical structure and electrostatic force balance mode.