The Design and Realization of Micro Induction Heater for the Thermal Bubble Generation

Abstract

This paper presents a micro induction heater based on the principle of induction heating. The liquid contact with the micro heater core directly and heated by the eddy current effect. The heating effect of the micro heater is simulated with the software of COMSOL. The simulation results indicate that the temperature of the micro heater core can reach to 540K in 0.9s while the current is 0.7A and the power frequency is 200 kHz. The relations between the heating effect and the micro induction heaters parameters such as the current, the AC power frequency and the coils parameters are studied in the simulation respectively. The prototype of the micro heater has been fabricated and the experimental test has carried with the micro heater. The experiments indicated that the micro heater can generate thermal bubble in 0.3s while the 1.0A high frequency current passes through the heater coil. The micro induction heater can be applied to a variety of thermal bubble devices, such as micro injector, micro switch and micro pump.