Research on Natural Frequency of MEMS Structure with Meander Suspensions by Mechanical Character Analysis

Abstract

A new concept of using four meander suspensions as a constraint is proposed to construct planar spring-like energy harvester actuators with larger displacement. Meander suspensions with multi-folded beams having three vibrating directions. This paper introduce a new structure of “-type” to calculate modulus of elasticity of one meander suspensions. Based upon the micro deformation theory and the displacement superposition theory, the expression on the displacement for the movement end of the meander beams by outer forces and force moments are deduced. Since the energy harvester is geometric symmetry, elasticity coefficient and natural frequency of the energy harvester will be deduce by above given information. The finite-element analysis was used to model the performances and verified the above mentioned mechanic analysis method.