Three-Dimensional Measurement System Based on Micro Stereovision

Abstract

With vision feedback the binocular micro stereovision system based on stereo light microscope (SLM) makes it possible to achieve 2D/3D high accuracy auto-positioning, 3D information extraction, 3D shape reconstruction and 3D measurement. Therefore, it is extensively used in micro robot navigation, micromanipulation, micro assembly and bioengineering, etc. To improve the key problems of low accuracy, refraction and occlusion in micro stereovision measurement, a novel micro stereo vision system is built based on optical theory and digital image processing. Then, the nonlinear correlation between optical paths of the micro stereo vision system is studied and the environment adaptive nonlinear model is established. On this basis, the coupling mechanism of multi-refraction and occlusion with micro-projection nonlinear model is proved, and multi-refraction variable refractive index correction and micro stereo occlusion reconstruction algorithms are developed. It realizes synchronization observation in larger field of view, rapid non-contact accuracy positioning and 3D measurement based on stereovision to solve the pivotal problems of accuracy positioning and measure in the chip encapsulation, micro assembly and the micro manipulation.