Sliding Mode Control for Electromagnetic Actuation MOEMS Scanning Mirror

Abstract

Sliding Mode Control (SMC) based on exponential switching law for electromagnetic actuation MOEMS mirror was proposed. This technique relies on the movable mass and the dynamics of the sliding surface. In such a way, the generated actuation tracks possible changes in the mechanical behavior induced by external factors (humidity, temperature, pressure, etc.). Stability of the proposed method is proved by Lyapunov second method. The system level model is established and simulated using MATLAB/Simulink. Simulation results show that: the scanning angle converges to reference value in only 0.45 seconds when using exponential switching law, which is decreased 55% compared with that using proportional switching law, and the sliding surface is much smooth too; the tracking error less than 0.25%, and sliding surface jittering in the range of 0.5. The proposed SMC controller can realize accurate control of mirror and having high performance and robustness in the presence of external disturbances and also can be applied to the closed-loop control of other vibrating devices.