The Study of SiC Thin Films Produced by Magnetron Sputtering

Abstract

In this paper, SiC films were deposited on the surface of 316L stainless steel by magnetron sputtering with sintering SiC target to improve its wear resistance. The structure and morphologies of the SiC films were characterized by XRD and SEM. The impacts of sputtering way, deposition time, and substrate temperature on the deposition rate and mechanical properties of SiC films were further investigated by the performance parameters of hardness, elastic modulus, friction and wear properties, coating adhesion, etc. The results show that coating adhesion is higher when the films are deposited by mid-frequency magnetron sputtering than that of which by direct current sputtering; Hardness and elastic modulus of the films increased gradually with the deposition time changing from 1 to 5h or the substrate temperature changing from room temperature to 200°C; However, the friction coefficient initially decreases, but turns to increase with the deposition time prolonging or the substrate temperature rising. The wear resistance of the films is the best when deposition time is 2h and substrate temperature is 100°C.