Long Range Ordering of 5-nm-Sized Dot Arrays with a Pitch of <10 nm along EB-Drawn Guide Lines Using PS-PDMS Self-Assembly

Abstract

We demonstrate the possibility of forming long-range-ordered self-assembled nanodot arrays with dots size of 5 nm and pitches of 10×7.5 nm2using guide line templates and low molecular weight (MW) (4,700–1,200 g/mol) poly (styrene)-poly (dimethylsiloxane) (PS-PDMS) for application in ultrahigh density patterned media. The self-assembled PDMS nanodots are controlled in a long range by varying the heights and gaps of the guide lines. Adopting the 14-nm-high resist guide lines with suitable gaps, the 5-nm-sized and 10×7.5 nm2-pitched self-assembled nanodots were ordered in maximum 7 dot arrays with long-range order. The experimental results demonstrate that the method is possible for achieving patterned media with magnetic recording densities of 8.6 Tbit/in.2using low MW PS-PDMS and slim guide lines.