The Displacement Characteristics of Piezoelectric Ceramic Micro Actuators Evaluated by Laser Interferometer

Author:

Wu Hong1,He Long Biao2,Zhou Jing Lin1,Yang Ping2

Affiliation:

1. Beijing University of Chemical Technology

2. National Institute of Metrology

Abstract

Understanding and measuring the displacement characteristics of piezoelectric ceramic with electric field exciting are particularly important. The piezoelectric coefficient d33 as the indication of its displacement characteristics, is the key parameter of its energy transformation. In this paper, the characteristics of two kinds of piezoelectric ceramics, PZT4 and PZT5 were studied by the laser interferometer measurement. The influence factors of d33 were studied, including the frequency and amplitude of the exciting signal, the ways of holding, and the loading sequence. Then the measurement results of piezoelectric ceramic with laser interferometer and the quasi-static method were compared, the results showed they had consistence and the analysis of the piezoelectric coefficient d33 measurement by converse piezoelectric effect and by piezoelectric effect was discussed.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference10 articles.

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2. Zhang L, Study of the micro actuators application. Machine Building & Automation, 2 (2010) 151-153.

3. Su SJ, Research of theory and key technologies of long-rang displacement measuring with nanometer resolution by grating, National University of Defense Technology. (2001).

4. V. T. Goloborod'ko, Use of a scanning fabry-perot interferometer with a piezoelectric ceramic at a very low modulation frequency, Journal of Applied Spectroscopy. 10 (1969) 442-443.

5. Pan. W. Y., et al, Double beam laser interferometer measurements of surface displacements at the resonance frequencies of PZT piezoelectric ceramic resonators, Ferroelectrics. 120 (1991) 231-239.

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