Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser

Abstract

Although the nanostructure machining by AFM probe assisted with laser has gain a great progress, few studies has been done on the optical fiber probe guiding the continuous laser to irradiate on AFM probe to machining nanostructure. Using this technology to create nanodot and nano-groove was presented in this paper. The law of how the experiment parameters influenced the results was summarized in the paper. The scale of nanodot is about 450nm, and nano-groove is about 40nm. When the fabrication is completed, the wear of the AFM probe was observed by SEM and drew a conclusion. In the method of nano machining by AFM Probe combining with a CW Laser, there will be a combined field to achieve the fabrication, and the method is better than mechanical characterization with AFM probe.