Review of Fabrication Methods of Nanotube / Nanowire Devices

Abstract

With the development of nano materials, a novel research field of NEMS forms by combining nano materials, nano-structures and nano fabrication with MEMS. Carbon nanotube (CNT) is a kind of one-dimensional nano structures which has unique mechanical, electrical and chemical properties. Using CNTs, new nano-devices with new principle or high performance would be developed. This paper reviews the assembly methods of one dimensional nanostructure and analyzes the characteristics of various methods, which provides reference for the device manufacturing methods using nanotubes/nanowires.