Affiliation:
1. National Formosa University
Abstract
Micromachine service life is often shortened by excessive adhesion and friction forces arising during fabrication or operation. SiC film is a possible choice for MEMS surfaces because of its favorable friction and wear properties. In this study, biocompatibility SAMs film (OTS), in advance, was used to decrease the adhesion force and extend the lifetime of MEMS devices for the different SiC topography. Experimental results show that OTS can increase the contact angle of SiC surfaces for the different roughness values and roughness directions. Small roughness value of OTS surfaces has a smaller friction coefficient than that of large roughness value surfaces.
Publisher
Trans Tech Publications, Ltd.