Affiliation:
1. Tamkang University
2. National Chin-Yi University of Technology
Abstract
Hot-embossing experiments were conducted on poly (methyl methacrylate) orthogonal arrays with base widths of 1μm, 3μm, 5μm, 10μm, and 50μm. The relationship between the base width with respect to average molecular weight and number average molecular weight of micropattern were also investigated. It was discovered that the average molecular weight and number average molecular weight decreased as the base width increased.
Publisher
Trans Tech Publications, Ltd.
Reference9 articles.
1. J. Schulze,W. Ehrfeld, H. Muller, A. Picard, in Proc. of SPIB 3289 (1998) p.22–32.
2. M. Hutley, R. Stevens, D. Daly, Proc. SPIIE 1573(1991) pp.110-121.
3. D. L. MacFarlane, V. Narayan, J. A. Tatum, W. R. Cox, T. Chen, D. J. Hayes, IIEEB Photonics Technol. Lett. 6 (9) (1994) pp.1112-1114.
4. Takanori Katoh, Nobuyoshi Nishi, Masafumi Fukagawa, Hiroshi Ueno, Susumu Sugiyama, Sensors and Actuators A 89 (2001) pp.10-15.
5. H. Schift, R. W. Jaszewski, C. David and J. Goberecht, Microelectronic Engineering, 46(1999) pp.121-124.