Application of High Aspect Ratio Scanning Probe in Microstructure Measurement

Abstract

An experiment, which is based on a self-developed pure tungsten high aspect ratio scanning probe, was conducted to measure the topography of a micro channel and a complex microstructure respectively. Comparison and analysis of both results by the tungsten probe and a single-crystal diamond probe were carried out. It indicates that the newly developed pure tungsten scanning probe has the capability in topography measurement, particularly fit for the high aspect ratio surface measurement.