Microstructure and Microhardness of Chrome-Oxide Coating Precipitating from Gases Phase Using Liquid of Metal Organic Chrome Compositions
Author:
Affiliation:
1. Al-Zaytoonah University of Jordan
2. Tokyo University of Science
3. Fujairah Men’s College, Higher Colleges of Technology
Abstract
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://www.scientific.net/KEM.803.60.pdf
Reference8 articles.
1. F.D. Lai, C.Y. Huang, C.M. Chang, L.A. Wang, and W.C. Cheng: Ultra-thin Cr2O3 well-crystallized films for high transmittance APSM in ArF line. Microelectron. Eng. 67/68, 17 (2003).
2. E. Sourty, J.L. Sullivan, and M.D. Bijker: Chromium oxide coatings applied to magnetic tape heads for improved wear resistance. Tribol. Int. 36, 389 (2003).
3. P. Hones, M. Diserens, and F. Levy: Characterization of sputter deposited chromium oxide thin films. Surf. Coat. Technol. 120/ 121, 277 (1999).
4. U. Rothhaar and H. Oechsner: Temperature induced dissolution of Cr2O3 into polycrystalline tantalum. Thin Solid Films 302, 266 (1997).
5. U.M. Lakhtin, Y.D. Kogan, A. P. Gorovoe: Obtaining of Protective Coatings by Pyrolysis of Metal-Organic Chromium Compounds, Materials science and Heat Treatment of Metals, Vol. 8, P 30 – 35, (1985).
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