Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry
Author:
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.287-288.3.pdf
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Correlation of III/V semiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance;Plasma Science and Technology;2017-10-24
2. Effect of the Substrate Geometry on Plasma Synthesis of DLC Coatings;Plasma Processes and Polymers;2009-05-26
3. Comparison of TALIF and catalytic probes for the determination of nitrogen atom density in a nitrogen plasma afterglow;Journal of Physics D: Applied Physics;2009-02-11
4. Oxygen atom density in capacitively coupled RF oxygen plasma;Vacuum;2009-01
5. A diagnostic method for real-time measurements of the density of nitrogen atoms in the postglow of an Ar–N2 discharge using a catalytic probe;Journal of Applied Physics;2005-05-15
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