Abstract
Different physical properties of laser-damaged HfO2film on SiO2substrate were detected by scanning probe acoustic microscope. Surface topographies of SPM showed that the depth of laser-damaged hole on the HfO2film was close to the thickness of film, while the phase images in probe-vibration mode of SPAM showed that the hydrophilicity of damaged area of HfO2film was higher than undamaged area which led to stronger absorption to water vapor in air. Some scratches on SiO2substrate surface under HfO2film was found in the acoustic images in sample-vibration mode of SPAM.
Publisher
Trans Tech Publications, Ltd.
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