Fabrication of Anodic Alumina Templates on Ti/Si Substrate and Preparation of Cu Nanorods by Electrochemical Process

Abstract

Abstract: Thin anodic alumina (AAO) templates with uniform nanoscale pore diameters and interpore distances were fabricated by a two-step anodization technique on a Si-based (AAO/Ti/Si structure) under controllable anodizing conditions. The obtained thin AAO templates were approximately 60 nm in pore diameter and 1.2 µm in length with 110 nm interpore distances in area of 1 cm2. A bottom barrier layer of the anodic alumina (AAO) templates was removed by a wet etching using phosphoric acid (5 wt%) under control of etching time. As an application, Cu nanorods arrays embedded in anodic alumina (AAO) template were fabricated by electrodeposition. The morphologies and structure of the templates and the Cu nanorods produced were analyzed using Field-emission scanning electron microscope (FESEM), Energy dispersive x-ray spectroscopy (EDX) and X-ray diffraction (XRD).