Affiliation:
1. Northwestern Polytechnical University
Abstract
ZrC coatings were prepared by CVD using ZrCl4, C3H6, and H2as the precursors. The mechanisms responsible for the effects of deposition temperature, H2flow rate and inlet C/Zr ratio on the ZrC coatings were studied based on the deposition mechanism of ZrC. The results indicate that the ZrC morphologies change from a loose spherical structure to a cauliflower structure, then to a glassy structure as the deposition temperature increases from 1050°C to 1150°C, then to 1250°C. The carbon content in the ZrC coatings increases with increasing the deposition temperature. Higher inlet C/Zr ratio can lead to rough surfaces and higher carbon content. Reasonable H2concentration can inhibit carbon deposition, and lead to a cauliflower structure.
Publisher
Trans Tech Publications, Ltd.
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