Abstract
A series of Ti/TiN multilayer films were prepared by reactive DC magnetron sputtering onto Si(111) substrates. The resistivity and optical reflectance of these thin films were measured as a function of the modulated, multilayered thickness and the number of layered structures. The resistivity decreased with increase in the number of layers in the film up to 4 layers. The reflectance in the near infrared region increased with increase in layer thickness but after a certain thickness, the change in reflectance was minimal. An optimum thickness of 25 nm for the modulated film realized a maximum of 0.829 in the near infrared reflectance. With the number of layers greater than 15, an interfacial layer of Ti2N was observed.
Publisher
Trans Tech Publications, Ltd.
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