Control Instability Applied to a Micro Electro Mechanical Actuator System (MEMS)

Abstract

MicroElectroMechanical Systems (MEMS) are devices what have been considered the technology of the future, being used in too many areas. MEMS are a combination of microstructures, micro sensors and micro actuators. The purpose of this work is to reduce the chaotic movement of the micro-actuator electrostatic to a small periodic orbit using the linear optimal control technique. The simulation results show that this technical is very effective.