Structure of Zr-Y-O Layer in Zr Y O / Si Al N-Based Multilayer Coatings

Abstract

TEM research of the structure of multilayered coatings consisting of alternating layers Si-Al-N and Zr-Y-O of equal thickness was carried out. It was shown that boundaries between different layers were the sharp enough, and the chemical composition in each layer was homogeneous. The phase composition of the layers on the basis of Zr-Y-O contained basically nanocrystalline ZrO2and the layers on the basis of Si-Al-N, contained partially amorphous, and partially nanocrystalline Si3N4.