Fabrication of Micro-Silicon Filter and Separating of Blood Cells

Abstract

This research developed a micro-silicon cell filter using MEMS fabricating technology, which has constant filtering channel size, uniformed distribution, and good surface quality. Blood cell filtering experiment was carried out by applying pressure injection and the filtering quality was studied via cell counting. The experimental results demonstrates that flat plate filter can implement blood cells filtering separation, and erythrocyte recycling rate reaches 90% with the 4～5m in filtering size and 0.1L/min injection flow-rate fulfilling the requirement of blood cells separation. Increasing the flow-rate can improve filtering efficiency to a certain degree but has little effect on erythrocyte recycling rate, because micro array filter is insensitive to back pressure in contract to the filled filter.