Affiliation:
1. Vladimir State University Alexander g. and Nicholas g. Stoletovs
Abstract
The article deals with producing diamondlike-PVD-coatings based on carbon: a-C and a-C:H and MeN/CNx. These types of coatings were prepared by magnetron sputtering materials in vacuum. The results of experimental studies of their mechanical and tribological properties and recommendations for use in industry
Publisher
Trans Tech Publications, Ltd.
Reference6 articles.
1. Tsai P. -C. Evaluation of microstructures and mechanical properties of diamond like carbon films deposited by filtered cathodic arc plasma / P. -C. Tsai, K. -H. Chen / Thin Solid Films. - Vol. 516. - No. 16. - 2008. - pp.5440-5444.
2. Experimental studies of the physical and mechanical properties of multilayer nanostructured coatings / I Bukarev, A Zhdanov / / Scientific and Technical Gazette Volga. 2011. №6. С. 116-118. ISSN 2079-5920.
3. Studying the properties of nanostructured PVD-coatings based on C / DM Kononov, AV Zhdanov, AN Korolev / Modern problems of science and education. - 2011. - № 6, p.130; URL: http: /www. science-education. ru/100-5252 ISSN 1817-6321.
4. Zeman H, Musil J, Vlcˇek J, Mayrhofer PH, MittererС Thermal annealing of sputtered Al-Si-Cu-N films. Vacuum 2004; 72: 21-8.
5. Engstroem C, Madan A, Birch J, Nastasi M, Hultman L, Barnett SA. High-temperature stability of epitaxial, non-isostructural Mo/NbNsuperlattices. J Mater Res 2000; 15: 554-9.