Study on Property of Ti-Based Nonevoparobal Getter

Author:

Li Teng Fei1,Zhang Yan1,Wei Xiu Ying1,Yuan Peng1,Mao Chang Hui1

Affiliation:

1. The Institute of the Advanced Electronic Materials

Abstract

The getters composed with Titanium and Zr-V-Fe were prepared by conventional powder metallurgical technology. The sorption properties and mechanical strength of the Ti-Zr-V-Fe getter prepared with three different average particle sizes of Titanium powder were investigated. The results showed that the smaller Titanium powders particle size can effectively improve the property of the nonevoparobal getter, but if particle size is too small, the sorption of the getter will decrease. The getter which was added with Titanium powder of 48μm has the best hydrogen sorption capability. With the decrease of the size of Titanium powder, mechanical strength will be improved remarkably. In the paper, the sorption characteristics for different gases were analyzed initially and the understanding for Zr-based getter is more extensive. The results show that the getters can adsorb activated gases, such as H2, N2 and CO. The pumping speed for H2 is best than that for N2 and CO.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

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