A New Method and Equipment to Manufacture the Composite Powder Materials by Vacuum Co-Deposition of Double Sources

Abstract

In the process of manufacturing the composite materials, some of the chemical components are difficult to combine with each other. Aiming at this problem, a new method and supporting equipment of manufacturing the composite powder materials is reported which can make any two (or more) kinds of components mixing in nano-scale. This method is derived from the vacuum co-depositing technology by two (or more) vaporization sources for vacuum film coating, and some of the structures in vacuum film coil coating machine are used for reference. The principle, structure, process and characteristics of this method are introduced in detail. The models for depositing rate calculation are built respectively for both the electric resistance evaporation sources and the magnetron sputtering targets. The mixing component uniformity in the depositing powder material is analyzed by calculation.