Analysis of a New Processing Method for Small Curvature Aaspheric

Abstract

For the aspheric processing is complex , time consuming and difficult to guarantte the eccentricity ,this paper introduce a new method of aspheric processing --repairing and polishing methed and describe the principle . Best fit radius, removal function were computed by mathematical model method and the respective performance curves were given by simulation. This methed has the particular advantage of shortening the working time ,reducing the eccentric amount of the element and improving the processing efficiency. Through this processing method, do a series of processing experiments on the smaller aspheric tolerance single crystal silicon aspheric.As the result indicated , plane surface shape error PV 0.52 μm,surface roughness RMS value of single-crystal silicon 0.09 μm ,the center deviation was less than1μm and the surface smoothness meet the standard above the grade Π.