Affiliation:
1. Zhengzhou University of Light Industry
Abstract
Porous silicon (p-Si) was fabricated by single-groove electrochemical anodic etching method; the influence of large etching current density on the surface morphology was observed. And the surface microstructure and photoluminescence (PL) of p-Si were shown by scanning electron microscope (SEM) and PL spectra, respectively. The SEM image showed that a new microstructure was formed at the large current density etching area, which resembled a crater structure; and the area away from the crater appeared the porous structure. The comparison results of the PL spectra for the different areas indicated that PL of the crater area has a shorter wavelength.
Publisher
Trans Tech Publications, Ltd.
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