Improving the Topography of Sample Surface by Controlling Redeposition Effects

Abstract

The FIB system utilizes ions (gallium, normally) produced by a liquid-metal source to scan over a sample surface and sputter away bulk material. It has been extensively utilized for specimen preparation for a wide range of analytical techniques owning to its capability of high spatial resolution imaging, milling, and deposition. Here, we demonstrate a novel way to control the redeposition effects during FIB milling. Significantly improved sample surfaces are shown and the results are verified by high magnification scanning electron microscopy.