Affiliation:
1. Johann Wolfgang Goethe-Universität
2. Darmstadt University of Technology
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
2 articles.
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1. Orientation dependent ion beam mixing of Ta/Si interfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08
2. Heavy ion induced intermixing at Ta/Si and Ta/SiO2 interfaces;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2004-11