Large Single Crystal Diamond Plates Produced by Microwave Plasma CVD-Reference-Cited by-同舟云学术

Large Single Crystal Diamond Plates Produced by Microwave Plasma CVD

Published:2009-03 Issue: Volume:615-617 Page:991-994
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Mokuno Yoshiaki¹,Chayahara Akiyoshi¹,Yamada Hideaki¹,Tsubouchi Nobuteru¹

Affiliation:

1. National Institute of Advanced Industrial Science and Technology

Abstract

Recent developments in producing large single crystal CVD diamond plates are reviewed. The developments consist of synthesis of large single crystal diamond and production of single crystal diamond plates from the bulk diamond by the lift-off process. Combining these developments, half-inch single crystal CVD diamond plates have been successfully produced.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.615-617.991.pdf

Reference7 articles.

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