The Phase Composition and Structure of Silicon-Carbon Coatings-Reference-Cited by-同舟云学术

The Phase Composition and Structure of Silicon-Carbon Coatings

Published:2019-09 Issue: Volume:970 Page:283-289
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Rudenkov Alexander S.¹,Rogachev Alexander V.¹,Kupo Alexander N.¹,Luchnikov Petr A.²,Chicherina Nataliya³

Affiliation:

1. Francisk Skorina Gomel State University

2. MIREA ‒ Russian Technological University

3. Tomsk Polytechnic University

Abstract

The effect of the formation and heat treatment modes of silicon-carbon coatings deposited by ion-beam sputtering of silicon carbide on their morphology, chemical and phase composition is determined. It has been established that an increase in the power of the ion source from 432 W to 738 W leads to a decrease in the sp3/sp2 phase ratio by 1.7 times and an increase in the ratio of Si-C/Si-O bonds by 1.9 times. It is shown that doping of carbon coatings with silicon carbide increases their heat resistance.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.970.283.pdf

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