A Novel Approach for the Recycling and Reusing of Silicon Slurry Waste-Reference-Cited by-同舟云学术

A Novel Approach for the Recycling and Reusing of Silicon Slurry Waste

Published:2019-01 Issue: Volume:944 Page:1234-1239
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Hu He Long¹,Li Hai Bin¹,Yu Wen Jun¹,Jiao Yong Zhen¹,Dong Ting Yi¹,Lv Bao Guo¹,Sun Jia Lin²

Affiliation:

1. Beijing Trillion Non-ferrous Metal Technology Research Center Co., Ltd

2. University of Science and Technology Beijing

Abstract

In silicon wafer manufacturing for solar cells, the hazardous sawing waste results in serious environmental problems. In this paper, a novel approach for the recycling and reusing of slurry waste is reported. The results show that slurry waste is recycled and reused completely, and composite material of Si3N4-Si2N2O-SiC is prepared. The residual gas from oxygen enrich gas production is used, which reduced cost effectively. In addition, the reaction is exothermic, which is also energy saving and ensure the production to be continuous without external heat source. The mechanism was also discussed in this paper.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.944.1234.pdf

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