Affiliation:
1. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)
Abstract
This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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