An Evaluation of FIB Cross-Sectioning Using a Cooling Stage for Metals and Alloys with Low Melting Point

Abstract

Functions of an observation and an analysis in electron microscope, such as scanning electron microscope (SEM) or transmission electron microscope (TEM) are indispensable to evaluate advanced materials. Therefore a specimen preparation technique, that is a front end of the electron microscopy, has become highly important, thus a choice of it affects a result of the evaluation. The authors was combined a cooling stage in FIB and applied it for evaluation of metals with low melting point. The electron microscopic evaluation of Lead solder, Indium, Tin and Bismuth, metals with low melting point, has been always discussed if the results represent the actual physics. Metals with low melting point are heat sensitive materials, so the comparison of cross-sectioning with room and low temperature, it can be said that low temperature cross-sectioning has less effect and keeps the actual physics of the sample. In this paper, some knowledge from comparisons of cross-sectioning with room and low temperature for metals with low melting point are reported.