Abstract
In magneto-plasma-dynamic (MPD) arcjet generators, plasma is accelerated by
electromagnetic body forces. Silicon nitride reactive spraying was carried out using an MPD
arcjet generator with crystal silicon rods and nitrogen gas. Because higher-velocity,
higher-temperature and higher-density and larger-area plasmas are produced with the MPD arcjet
generator than those with conventional thermal plasma torches, nitriding of silicon can be enhanced.
A dense and uniform β-Si3N4 coating with 30 μm in thickness was formed after 200 shots at a
repetitive frequency of 0.03 Hz with a discharge current of 9 kA and a substrate temperature of 700
°C. The Vickers hardness reached about 1300. Furthermore, silicon carbide and aluminum
nitride sprayings were conducted with some spraying systems. All results showed that the MPD
arcjet generator had high potentials for spraying.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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