Affiliation:
1. Gyeongsang National University
Abstract
PZT(70/30) powder was prepared by a sol-gel method and PZT thick films were
fabricated by the screen-printing method on the alumina substrates. The coating and drying procedure
was repeated 4 times. And then the PZT(30/70) precusor solution was spin-coated on the PZT thick
films. A concentration of a coating solution was 0.5 mol/L and the number of coating was varied from
0 to 6.
The porosity decreased and the grain size increased with increasing the number of coatings. The
thickness of the PZT-6(6: number of coatings) films was about 60~65μm. All PZT thick films showed
the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric
constant of the PZT-6 thick film was 540. The remanent polarization and coercive field of the PZT-6
film were 23.6 μC /cm2, 12.0 kV/cm, respectively.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Reference14 articles.
1. Y. H. Son, K. T. Kim, and C. I. Kim: J. of KIEEME(in Korean), Vol. 17(2004), p.947.
2. T. Futakuchi, Y. Matsui, and M. Adachi: Jpn. J. Appl. Phys. Vol. 38(1999), p.5528.
3. Y. Ohba, M. Miyauchi, and M. Adachi: Jpn. J. Appl. Phys. Vol. 32(1993), p.4095.
4. M. Okuyama, Y. Ishibashi: Ferroelectric Thin Films, Topic Appl. Phys. 98, 25-57 (2005).
5. V. Walter, P. Delobelle, P. L. Mlal, E. Joseph, and M. Collet, Sensors and Actuators A, Vol. 96, p.157, (2002).