Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions-Reference-Cited by-同舟云学术

Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions

Published:2007-11 Issue: Volume:134 Page:237-240
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Lee Seung Ho¹,Kim Tae Gon¹,Kwon Tae Young¹,Park Jin Goo¹,Bae So Ik²,Lee Gun Ho²,Kim In Jung²

Affiliation:

1. Hanyang University

2. R&D Center

Abstract

Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH to a bath without recirculation resulted in higher PRE over 93 %.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.134.237.pdf

Reference11 articles.

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3. J. G. Park: Japanese Journal of Applied Physics 36-9 (1997), pp.5416-5420.

4. Kern, W.: Handbook of Semiconductor Wafer Cleaning Technology - Science, Technology and Applications (William Andrew Publishing, 1993).

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